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MEMS Lorentz force magnetometers from specifications to product von Buffa, Cesare

Available for University of the Philippines System via SpringerLink. Click here to access
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MEMS cost analysis from laboratory to industry von Lawes, Ronald A.

Available for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access
Also available remotely for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access thru EZproxy

Micromechanics and MEMS classic and seminal papers to 1990

MEMS & microsystems design and manufacture von Hsu, Tai-Ran

Smart MEMS and sensor systems von Gaura, Elena

Microsystem design von Senturia, Stephen D. 1940-

Design and implementation of a high sensitivity differential capacitance sensing circuit for MEMS accelerometers von Estrada, Erik John C.

Development of a high sensitivity MEMS accelerometer for bipedal robots von Manglicmot, Lester Ryan G.

Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes von Bao, Min-Hang

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Mechanical design of microresonators modeling and applications von Lobontiu, Nicolae